Abstract

White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces (<TEX>$Ra{\approx}500\;nm$</TEX>), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

© 2006 Optical Society of Korea

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  1. T. V. Vorburger, J. A. Dagata, G. Wilkening, and K. Iizuka, Beam Effects, Surface Topography, and Depth Profiling In Surface Analysis (Plenum, New York, USA, 1998), pp. 275-354
  2. T. V. Vorburger and J. Fu, N. Orji, "In rough," OE Magazine, March 2002, pp. 31-34, 2002
  3. J. E. Greivenkamp and H. Bruning, Optical Shop Testing (Wiley, New York, USA, 1992), pp. 501-598
  4. L. Deck and P. de Groot, "High-speed noncontact profiler based on scanning white-light interferometer," Appl. Opt., vol. 33, no. 31, pp. 7334-7338, 1994
    [Crossref]
  5. A. Harasaki, J. Schmit, and J. C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt., vol. 39, no. 13, pp 2107-2115, 2000
    [Crossref]
  6. M. G. Kang, S. Y. Lee, and S. W. Kim, "Self-compensation of PZT errors in white light scanning interferometry," J. Opt. Soc. Kor., vol. 3, no. 2, pp. 35-40, 1999
    [Crossref]
  7. A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt., vol. 39, no. 13, pp. 2101-2106, 2000
    [Crossref]
  8. H. G. Rhee, T. V. Vorburger, J. W. Lee, and J. Fu, "Discrepancies between roughness measurements obtained with phase shifting interferometer and white-light interferometry," Appl. Opt., vol. 44, no. 28, pp. 5919-5927, 2005
    [Crossref]
  9. ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. Of Mech. Eng., USA, 2003), pp. 6-12
  10. www.rubert.co.uk, accessed 12 December 2005
  11. J. F. Song, T. V. Vorburger, and P. Rubert, "Comparison between precision roughness master specimens and their electroformed replicas," Prec. Eng., vol. 14, no. 2, pp. 84-90, 1992
    [Crossref]
  12. T. V. Vorburger, J. F. Song JF, C. H. W. Giauque, T. B. Renegar, E. P. Whitenton, and M. C. Croarkin, "Stylus-laser surface calibration system," Prec. Eng., vol. 19, no. 3, pp. 157-163, 1996
    [Crossref]
  13. ISO, Guide to the Expression of Uncertainty in Measurement (International Organization for Standardization, Geneva, Switzerland, 1995), pp. 19-24.
  14. ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. of Mech. Eng., USA, 2003), pp. 25-29

2005 (2)

H. G. Rhee, T. V. Vorburger, J. W. Lee, and J. Fu, "Discrepancies between roughness measurements obtained with phase shifting interferometer and white-light interferometry," Appl. Opt., vol. 44, no. 28, pp. 5919-5927, 2005
[Crossref]

www.rubert.co.uk, accessed 12 December 2005

2003 (2)

ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. of Mech. Eng., USA, 2003), pp. 25-29

ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. Of Mech. Eng., USA, 2003), pp. 6-12

2002 (1)

T. V. Vorburger and J. Fu, N. Orji, "In rough," OE Magazine, March 2002, pp. 31-34, 2002

2000 (2)

A. Harasaki, J. Schmit, and J. C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt., vol. 39, no. 13, pp 2107-2115, 2000
[Crossref]

A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt., vol. 39, no. 13, pp. 2101-2106, 2000
[Crossref]

1999 (1)

M. G. Kang, S. Y. Lee, and S. W. Kim, "Self-compensation of PZT errors in white light scanning interferometry," J. Opt. Soc. Kor., vol. 3, no. 2, pp. 35-40, 1999
[Crossref]

1998 (1)

T. V. Vorburger, J. A. Dagata, G. Wilkening, and K. Iizuka, Beam Effects, Surface Topography, and Depth Profiling In Surface Analysis (Plenum, New York, USA, 1998), pp. 275-354

1996 (1)

T. V. Vorburger, J. F. Song JF, C. H. W. Giauque, T. B. Renegar, E. P. Whitenton, and M. C. Croarkin, "Stylus-laser surface calibration system," Prec. Eng., vol. 19, no. 3, pp. 157-163, 1996
[Crossref]

1995 (1)

ISO, Guide to the Expression of Uncertainty in Measurement (International Organization for Standardization, Geneva, Switzerland, 1995), pp. 19-24.

1994 (1)

L. Deck and P. de Groot, "High-speed noncontact profiler based on scanning white-light interferometer," Appl. Opt., vol. 33, no. 31, pp. 7334-7338, 1994
[Crossref]

1992 (2)

J. E. Greivenkamp and H. Bruning, Optical Shop Testing (Wiley, New York, USA, 1992), pp. 501-598

J. F. Song, T. V. Vorburger, and P. Rubert, "Comparison between precision roughness master specimens and their electroformed replicas," Prec. Eng., vol. 14, no. 2, pp. 84-90, 1992
[Crossref]

Applied Optics (4)

L. Deck and P. de Groot, "High-speed noncontact profiler based on scanning white-light interferometer," Appl. Opt., vol. 33, no. 31, pp. 7334-7338, 1994
[Crossref]

A. Harasaki, J. Schmit, and J. C. Wyant, "Improved vertical-scanning interferometry," Appl. Opt., vol. 39, no. 13, pp 2107-2115, 2000
[Crossref]

A. Harasaki and J. C. Wyant, "Fringe modulation skewing effect in white-light vertical scanning interferometry," Appl. Opt., vol. 39, no. 13, pp. 2101-2106, 2000
[Crossref]

H. G. Rhee, T. V. Vorburger, J. W. Lee, and J. Fu, "Discrepancies between roughness measurements obtained with phase shifting interferometer and white-light interferometry," Appl. Opt., vol. 44, no. 28, pp. 5919-5927, 2005
[Crossref]

Journal of the Optical Society of Korea (1)

M. G. Kang, S. Y. Lee, and S. W. Kim, "Self-compensation of PZT errors in white light scanning interferometry," J. Opt. Soc. Kor., vol. 3, no. 2, pp. 35-40, 1999
[Crossref]

OE Magazine (1)

T. V. Vorburger and J. Fu, N. Orji, "In rough," OE Magazine, March 2002, pp. 31-34, 2002

Precision Engineering (2)

J. F. Song, T. V. Vorburger, and P. Rubert, "Comparison between precision roughness master specimens and their electroformed replicas," Prec. Eng., vol. 14, no. 2, pp. 84-90, 1992
[Crossref]

T. V. Vorburger, J. F. Song JF, C. H. W. Giauque, T. B. Renegar, E. P. Whitenton, and M. C. Croarkin, "Stylus-laser surface calibration system," Prec. Eng., vol. 19, no. 3, pp. 157-163, 1996
[Crossref]

Other (6)

ISO, Guide to the Expression of Uncertainty in Measurement (International Organization for Standardization, Geneva, Switzerland, 1995), pp. 19-24.

ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. of Mech. Eng., USA, 2003), pp. 25-29

T. V. Vorburger, J. A. Dagata, G. Wilkening, and K. Iizuka, Beam Effects, Surface Topography, and Depth Profiling In Surface Analysis (Plenum, New York, USA, 1998), pp. 275-354

J. E. Greivenkamp and H. Bruning, Optical Shop Testing (Wiley, New York, USA, 1992), pp. 501-598

ASME B46. 1-2002, Surface Texture [Surface Roughness, Waviness, and Lay] (An American National Standard, The Am. Soc. Of Mech. Eng., USA, 2003), pp. 6-12

www.rubert.co.uk, accessed 12 December 2005

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