Abstract

We report on the design and the fabrication of 1D photonic crystal nanobeam cavities with optical resonances around 800 nm, compatible with rubidium, cesium, or argon atomic transitions. The cavities are made of indium gallium phosphide material, a III-V semi-conductor compound which has a large index of refraction ($n\simeq 3.3$) favoring strong optical confinement and small mode volumes. Nanobeam cavities with inline and side coupling have been designed and fabricated, and quality factors up to $2\times {10}^4$ have been measured.

© 2019 Optical Society of America

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