Abstract

We report on the thermomechanical and thermal tuning properties of curved-mirror Fabry–Perot resonators, fabricated by the guided assembly of circular delamination buckles within a multilayer $\mathrm{a}\text{-}\mathrm{Si}/{\mathrm{SiO}}_2$ stack. Analytical models for temperature dependence, effective spring constants, and mechanical mode frequencies are described and shown to be in good agreement with experimental results. The cavities exhibit mode volumes as small as $\sim 10{\lambda }^3$, reflectance-limited finesse $\sim 3\times {10}^3$, and mechanical resonance frequencies in the MHz range. Monolithic cavity arrays of this type might be of interest for applications in sensing, cavity quantum electrodynamics, and optomechanics.

© 2015 Optical Society of America

Small-mode-volume, channel-connected Fabry–Perot microcavities on a chip

Mohammad H. Bitarafan and Ray G. DeCorby
Appl. Opt. 56(36) 9992-9997 (2017)

Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities

G. J. Hornig, K. G. Scheuer, E. B. Dew, R. Zemp, and R. G. DeCorby
Opt. Express 30(18) 33083-33096 (2022)

Monolithic elliptical dome Fabry–Perot microcavities exhibiting large birefringence

G. J. Hornig, L. Bu, S. Al-Sumaidae, and R. G. DeCorby
J. Opt. Soc. Am. B 39(3) 884-890 (2022)

High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO₂ multilayers

T. W. Allen, J. Silverstone, N. Ponnampalam, T. Olsen, A. Meldrum, and R. G. DeCorby
Opt. Express 19(20) 18903-18909 (2011)

Pressure sensing with high-finesse monolithic buckled-dome microcavities

S. Al-Sumaidae, L. Bu, G. J. Hornig, M. H. Bitarafan, and R. G. DeCorby
Appl. Opt. 60(29) 9219-9224 (2021)