Multilayer plasmonic optical metasurfaces are demonstrated and analyzed that provide highly wavelength-selective reflectance that is robust to variation in angle of incidence and highly tolerant of misalignment of features between vertically stacked layers. Structures containing two layers of Ag nanostructure arrays separated by a dielectric layer are shown to provide reflectance and transmittance over a bandwidth of , with minimal variation for angles of incidence varying from 0° to 30°. These characteristics are shown to be robust to variations in vertical alignment between layers comparable to the array period. An analysis of these characteristics in terms of plasmonic behavior of individual Ag nanostructures, interference effects between multiple layers of nanostructure arrays, and phase shifts produced at each array layer is presented.
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