Abstract

A method to analyze extreme ultraviolet microscopy images of nanostructures that allows for the simultaneous determination of an object’s feature size and image resolution is presented. It is based on the correlation between the image and a set of templates of known resolution generated from the original image using Gaussian filters. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses a 13.2nm wavelength laser light for illumination. The object’s feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes.

© 2008 Optical Society of America

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