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Standing waves in optical positive photoresist films: a new approach

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Abstract

A new approach to the problem of standing waves in a thin positive photoresist film is given. Explicit analytic expressions are obtained in terms of the classical WKB approximation. A self-contained, convergent iteration scheme is offered for accurate determination of the fields and the concentration of the photoactive compound as functions of depth and time.

© 1988 Optical Society of America

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