Abstract

The methods of immersion spectroscopic reflectometry presented in the preceding paper [ J. Opt. Soc. Am. A 5, 459 ( 1988)] are employed for the complete optical analysis of typical nonabsorbing single, double, and triple layers, It is shown that these methods are suitable for analyzing such systems from the practical point of view. Advantages of these methods are outlined, and comparisons with other optical methods are made.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Immersion spectroscopic reflectometry of multilayer systems. I. Theory

Ivan Ohlídal
J. Opt. Soc. Am. A 5(4) 459-464 (1988)

Application of Immersion Reflectometry to the Study of Interference Layers

W. P. Ellis, L. D. Allen, and A. D. Mulford
Appl. Opt. 8(11) 2177-2183 (1969)

Characterization of a multilayer highly reflecting mirror by spectroscopic phase-modulated ellipsometry

Dibyendu Bhattacharyya, Naba K. Sahoo, Sudhakar Thakur, and Nimai C. Das
Appl. Opt. 40(10) 1707-1714 (2001)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription