Abstract

In conventional ellipsometry a quarter-wave plate that is not ideal introduces small errors in the ellipsometer readings. An ellipsometer with an ideal quarter-wave plate, when used to examine an anisotropic surface, gives readings that also appear to have errors. These deviations, however, are caused by the anisotropic sample itself. The contributions to ellipsometer readings from these two causes are discussed, and the exact equations for calculating the ellipsometer null settings with an imperfect wave plate and an anisotropic sample are presented.

© 1988 Optical Society of America

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