Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Reflection and transmission ellipsometry of a uniform layer

Not Accessible

Your library or personal account may give you access

Abstract

We examine the general properties of the ellipsometric quantities ρ = rp/rs and τ = tp/ts for a nonabsorbing uniform film. At fixed angle of incidence and for variable thickness, τ moves periodically along circles (as is known) and ρ along quartics in the complex plane. For the special case of a film between like media we derive envelopes (and corresponding bounds on τ and ρ) as functions of the dielectric constants of the layer and its bounding medium. In the case of unlike media on either side of the film, bounds are found for Re τ and Im τ for 2 > 12 (where 1, , and 2 are, respectively, the dielectric constants of the medium from which light is incident, of the film, and of the substrate), we find an approximate upper bound for the ellipsometric quantity ρ¯ (defined as Im ρ when Re ρ = 0).

© 1987 Optical Society of America

Full Article  |  PDF Article
More Like This
Ellipsometry of surface films on a uniform layer

John Lekner
J. Opt. Soc. Am. A 5(7) 1044-1047 (1988)

Inversion of reflection ellipsometric data

John Lekner
Appl. Opt. 33(22) 5159-5165 (1994)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (43)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved