Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Influence of oblique illumination on perfect Talbot imaging and nearly perfect self-imaging for gratings beyond five diffraction orders

Not Accessible

Your library or personal account may give you access

Abstract

The Talbot self-imaging effect of amplitude gratings is afflicted with aberrations that distort the self-image. This occurs especially if the grating period p is only a few times larger than the illumination wavelength λ. For example, for lithographic applications of the Talbot effect these aberrations lower the lateral writing resolution and should be minimized. Noponen found, however, some discrete ratios of p/λ in the interval of 2.0<p/λ<3 that are aberration-free. We generalize the definition of the Talbot distance to include oblique illumination and show how Noponen’s discrete ratios can be shifted by it. In the second part, we look at ratios of p/λ larger than 3, so that there are more than five diffraction orders behind the grating. For this region we present a method to find ratios of p/λ with at least minimal aberrations and present some self-image examples that are of interest for lithographic purposes up to the range of p/λ12.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Quantitative analysis of imperfect frequency multiplying in fractional Talbot planes and its effect on high-frequency-grating lithography

Daniel Thomae, Oliver Sandfuchs, and Robert Brunner
J. Opt. Soc. Am. A 31(7) 1436-1444 (2014)

Phases of Talbot patterns in angular self-imaging

Hugues Guillet de Chatellus, Eric Lacot, Olivier Hugon, Olivier Jacquin, Naïma Khebbache, and José Azaña
J. Opt. Soc. Am. A 32(6) 1132-1139 (2015)

Flexible mask illumination setup for serial multipatterning in Talbot lithography

Daniel Thomae, Jacqueline Maaß, Oliver Sandfuchs, Alexandre Gatto, and Robert Brunner
Appl. Opt. 53(9) 1775-1781 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved