Abstract
An extended and refined scattering-matrix method is proposed for the efficient full parallel implementation of rigorous coupled-wave analysis of multilayer structures. The total electromagnetic field distribution in the rigorous coupled-wave analysis is represented by the linear combination of the eigenmodes with their own coupling coefficients. In the proposed scheme, a refined recursion relation of the coupling coefficients of the eigenmodes is defined for complete parallel computation of the electromagnetic field distributions within multilayer structures.
© 2007 Optical Society of America
Full Article | PDF ArticleMore Like This
Hwi Kim and Byoungho Lee
J. Opt. Soc. Am. A 25(1) 40-54 (2008)
Hwi Kim and Byoungho Lee
J. Opt. Soc. Am. B 25(4) 518-544 (2008)
M. G. Moharam, Drew A. Pommet, Eric B. Grann, and T. K. Gaylord
J. Opt. Soc. Am. A 12(5) 1077-1086 (1995)