The theory that is described offers a framework by which the image of a polygonal amplitude object can be calculated in both a homogeneous image space and one in which a perfectly conducting screen is inserted normal to the optical axis. Full account has been taken of the vectorial character of the electromagnetic radiation. Because of the desired application to photoresist exposure, the time-averaged electric-energy density is calculated. The integral representations are derived for both coherent and incoherent objects. The polarization direction can be adjusted as required. Numerical results are presented for the image of edge objects that are illuminated by a monochromatic coherent beam, which is polarized either normal to or along the edge, or by a quasi-monochromatic incoherent beam. The differences between the calculated distributions of the time-averaged electric-energy density are discussed.
© 1982 Optical Society of AmericaFull Article | PDF Article
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