Abstract

In the vacuum-ultraviolet region of the spectrum, the optical constants of vacuum-deposited absorbing films can be determined by measuring their specular reflectances at a number of angles of incidence. These reflectance values are then used to solve the generalized Fresnel reflection equations to obtain n and k. If the film is thin enough so that interference occurs between the wave fronts reflected from the film–vacuum and film–substrate interfaces, the errors in determining n and k may be large. Previously an opaque film, one that would transmit only 0.1% of the incident radiant flux at normal incidence if it were free-standing, was considered necessary if the n, k values of the film were to be determined with an accuracy of 1%. This paper presents the results of calculations demonstrating that the film thickness necessary to reduce the errors in n and k to 1% is dependent on n and k and is generally less than the opaque thickness.

© 1974 Optical Society of America

Reflectance and optical constants of evaporated ruthenium in the vacuum ultraviolet from 300 to 2000 Å*

J. T. Cox, G. Hass, J. B. Ramsey, and W. R. Hunter
J. Opt. Soc. Am. 64(4) 423-428 (1974)

Errors in using the Reflectance vs Angle of Incidence Method for Measuring Optical Constants*

W. R. Hunter
J. Opt. Soc. Am. 55(10) 1197-1204 (1965)

Optical Properties of Evaporated Iridium in the Vacuum Ultraviolet from 500 Å to 2000 Å *†

G. Hass, G. F. Jacobus, and W. R. Hunter
J. Opt. Soc. Am. 57(6) 758-762 (1967)

Optical Properties of Evaporated Rhodium Films Deposited at Various Substrate Temperatures in the Vacuum Ultraviolet from 150 to 2000 Å*

J. Thomas Cox, G. Hass, and W. R. Hunter
J. Opt. Soc. Am. 61(3) 360-364 (1971)

Reflectance and optical constants of evaporated osmium in the vacuum ultraviolet from 300 to 2000 Å*

J. T. Cox, G. Hass, J. B. Ramsey, and W. R. Hunter
J. Opt. Soc. Am. 63(4) 435-438 (1973)