Abstract

Expressions for the errors produced in an ellipsometer due to an imperfect compensator, due to birefringence in windows of a cell containing the sample, and due to tilting of the sample are derived. Methods of analyzing the ellipsometer readings to eliminate these errors are given.

© 1970 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurement and Correction of First-Order Errors in Ellipsometry

D. E. Aspnes
J. Opt. Soc. Am. 61(8) 1077-1085 (1971)

Analysis of systematic errors in rotating-analyzer ellipsometers*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 64(11) 1459-1469 (1974)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (1)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (91)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription