Abstract

The reflection efficiencies for the various orders of diffraction produced by a grating are calculated under the following assumptions. The grating is for the most part flat, but with a fraction ∊ of the periodicity interval a described by a profile function z=f(x). The reflection and transmission efficiencies are calculated as a series expansion in ∊. Numerical calculations have been performed for the case of ultrasoft x rays incident at near grazing angles, using a complex index of refraction η=1−δ₀λ²+iβ₀λ^3.25 or tabulated values. No effects of shadowing by the grating profile have been considered, and the numerical work has been done for a symmetrical triangular trench incised in the flat surface.

© 1964 Optical Society of America

Reflection from an Absorbing Multilayer System

Jack C. Miller and James P. Butler
J. Opt. Soc. Am. 58(12) 1604-1606 (1968)

Precise Method for Measuring the Absolute Phase Change on Reflection

Jean M. Bennett
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Harold Osterberg and Luther W. Smith
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Reflection Efficiencies of Grating in the Soft X-Ray Region

Shiro Fujiwara and Yasuo Iguchi
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J. Opt. Soc. Am. 54(10) 1190-1197 (1964)