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Apparatus for the Measurement of Vacuum Ultraviolet Optical Properties of Freshly Evaporated Films before Exposure to Air

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Abstract

An apparatus for the measurement of reflectance and transmittance is described which, with a specially constructed vacuum evaporator and a monochromator, enables the study of the optical properties of thin films in the wavelength region 500 A to 2000 A. The optical measurements can be made immediately after the samples are prepared without exposing them to air. The apparatus allows the measurement of sample transmittance, and sample reflectance can be determined as a function of incidence angle. The light source is differentially chopped to sort the grating orders, eliminate dc drift and improve the signal-to-scatter ratio by a factor of 10 to 20. Some of the results obtained with this instrument are presented. It is shown that the reflectance of aluminum at λ1216 A decays substantially in vacuum (5 × 10−6 mm Hg) even in the first minutes after deposition, and decreases by a factor of 2 after one day in air. A value of over 70% is indicated for the initial normal incidence reflectance of aluminum at λ1216 A, which is considerably higher than previously reported. It is shown that the reflectance of platinum remains essentially constant after deposition. Other data on the reflectance of aluminum, platinum, and rhodium are presented.

© 1961 Optical Society of America

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