Abstract

We report ultra-low propagation losses in silicon sub-micrometric waveguides on a 200 mm CMOS compatible photonics platform. We show median losses in C-band (O-band) as low as 0.1 dB/cm and 0.7 dB/cm (0.14 dB/cm and 1.1 dB/cm) in monomode rib and strip waveguides, respectively, thanks to a H₂ smoothing annealing. In addition to the significant loss reduction, we show that the performance characteristic of the main passive and active components of the photonics platform are preserved or even improved by the smoothing process.

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