Abstract

We achieve 200 mW optical output power, 18 GHz bandwidth, and 35% wall plug efficiency with 19-element (novemdecuple) top-surface-emitting 980 nm oxide-confined vertical-cavity surface-emitting laser (VCSEL) arrays – a record combination of these three attributes. We grow wafers by metal-organic vapor phase epitaxy and process arrays into a unique two-dimensional honeycomb geometry with top mesa inter-VCSEL ridge connectors and p-metal anode interconnections. We study the impact on array performance of inter-VCSEL spacing and bottom n-doped mesa area. The top emitting VCSELs are optically uncoupled but electrically connected in parallel via anode ring-to-ring p-metal along the ridges and a common horseshoe ohmic cathode n-metal. We demonstrate the potential of our arrays as sources for optical wireless communication via 25 Gb/s data transmission tests.

Impact of oxide aperture diameter on optical output power, spectral emission, and bandwidth for 980 nm VCSELs

Faten Adel Ismael Chaqmaqchee and James A. Lott
OSA Continuum 3(9) 2602-2613 (2020)

3D-printed facet-attached optical elements for connecting VCSEL and photodiodes to fiber arrays and multi-core fibers

Pascal Maier, Yilin Xu, Mareike Trappen, Matthias Lauermann, Alexandra Henniger-Ludwig, Hermann Kapim, Torben Kind, Philipp-Immanuel Dietrich, Achim Weber, Matthias Blaicher, Clemens Wurster, Sebastian Randel, Wolfgang Freude, and Christian Koos
Opt. Express 30(26) 46602-46625 (2022)

High-speed characteristics of vertical cavity surface emitting lasers and resonant-cavity-enhanced photodetectors based on intracavity-contacted structure

Y. M. Song, B. K. Jeong, B. H. Na, K. S. Chang, J. S. Yu, and Y. T. Lee
Appl. Opt. 48(25) F11-F17 (2009)

Phase-locking dynamics of a 2D VCSEL hexagonal array with an integrated Talbot cavity

Yanhong Ma, Tian Lan, Xiaofan Wang, Renjie Ruan, Yinhua Cao, Jingjing Dai, and Zhiyong Wang
Opt. Express 30(6) 9892-9903 (2022)

MEMS-tunable VCSELs using 2D high-contrast gratings

Pengfei Qiao, Kun Li, Kevin T. Cook, and Connie J. Chang-Hasnain
Opt. Lett. 42(4) 823-826 (2017)