Abstract

This article reports on a highly-sensitive indirect-conversion X-ray detector with an embedded photodiode formed by a scintillator-coupled 3-D photosensitive thin-film transistor. A high X-ray sensitivity up to 2.5 × 10⁵ μC·Gy⁻¹·cm⁻² at a dose of 1 mGy is achieved due to full photon utilization and a high photo gain of ∼10⁴ by operating it in an active pixel sensor format. These performance characteristics make it a great promise for low-dose and high-spatial resolution large-area indirect-conversion X-ray detection.

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