Abstract

We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 μPa/Hz1/2 at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.

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