Abstract

In this paper, a novel optical microelectromechanical systems accelerometer sensor is proposed by using a two-dimensional photonic crystal add-drop filter which is relied on a wavelength modulation approach. The proposed optical sensing system consists of a laser diode light source, tunable add-drop filter based on ring resonator principal, photo-detector, and integrated waveguides. Simulation results show that the functional characteristics of the proposed sensor are as follows: mechanical sensitivity of 1.6 nm/g, linear measurement range of $-$ 156 to 156 g, optical sensitivity of 0.0756 nm/g, and first resonance frequency of 12.9 kHz. These functional characteristics make it very interesting in a wide spectrum of applications, ranging from consumer electronics to automotive and inertial navigation.

© 2017 IEEE

Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal

Arash Sheikhaleh, Kambiz Abedi, Kian Jafari, and Reza Gholamzadeh
Appl. Opt. 55(32) 8993-8999 (2016)

Coarse-to-fine optical MEMS accelerometer design and simulation

Mojtaba Rahimi, Majid Taghavi, and Mohammad Malekmohammad
Appl. Opt. 61(2) 629-637 (2022)

Optical add-drop filters based on photonic crystal ring resonators

Zexuan Qiang, Weidong Zhou, and Richard A. Soref
Opt. Express 15(4) 1823-1831 (2007)

Controllable one-way add-drop filter based on magneto-optical photonic crystal with ring resonator and microcavities

Gangchao Tang, Yuhao Huang, Jianfeng Chen, Zhi-Yuan Li, and Wenyao Liang
Opt. Express 30(16) 28762-28773 (2022)

Design of a high-Q channel add-drop multiplexer based on the two-dimensional photonic-crystal membrane structure

Kyu H. Hwang and G. Hugh Song
Opt. Express 13(6) 1948-1957 (2005)