Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 31,
  • Issue 24,
  • pp. 4126-4134
  • (2013)

Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect

Not Accessible

Your library or personal account may give you access

Abstract

Two different mirror pairs of 45°-assembled swing-type micro-electro-mechanical systems mirrors for optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9° and 9.8° for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.

© 2013 IEEE

PDF Article
More Like This
A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee
Opt. Express 19(15) 13812-13824 (2011)

Magnetically actuated MEMS microlens scanner for in vivo medical imaging†

Chin-Pang-Billy Siu, Haishan Zeng, and Mu Chiao
Opt. Express 15(18) 11154-11166 (2007)

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Chung-De Chen, Yu-Jen Wang, and Pin Chang
Opt. Express 20(24) 27003-27017 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved