Abstract

In this study, an innovative design for porous silicon (PSi) based sensors is proposed to eliminate some problems of conventional PSi sensors such as undesired reflections from imprecise positioning of the fiber optic cable and the PSi structure. Our design has three stages as hole milling for fiber socket, fabrication of filter structure, and integration of the fiber optic cable to the bulk Si. We have carried out reflectivity measurements of alcohols with close refractive index values by the proposed and conventional sensors. From the measurements, we note that both sensors have equal sensitivity in identifying alcohols, that repeatability of our proposed sensor is relatively higher, and that our sensor allows easy positioning and flexibility in sensing applications. Nonetheless, our proposed sensor necessitates a thorough fabrication process and a methodological preparation.

© 2012 IEEE

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription