Abstract
We investigate an optically resonant cavity which is created between a reflecting
micro-cantilever and a diffraction grating etched into a silicon waveguide. Changes in
cavity resonance, induced by small deflections of the micro-cantilever result in large
changes in an optical signal transmitted through the waveguide. An analytical model can
predict the cantilever position for maximum and minimum transmission and is confirmed by
three-dimensional finite difference time domain (FDTD) simulations. This approach can be
used to accurately determine the position of a micro-cantilever with a predicted optimal
shot noise limited deflection noise density of 4.1 fm/√Hz.
© 2012 IEEE
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