Abstract

This paper presents simple fabrication of optical waveguides using a novel photosensitive polyimide (PSPI). PSPI has a glass transition temperature (Tg) of 330 °C and is directly patterned by ultraviolet (UV) exposure and wet-chemical development, lending itself to low-cost fabrication techniques. The fabricated waveguides possess low optical absorption at 1.3 and 1.5 µm. Single and multimode buried ridge waveguides were made and tested, and a 0.4-dB/cm optical propagation loss is measured at 1.55 µm.

© 2005 IEEE

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