Abstract

A three-dimensional (3-D) microoptical bench prepared using bulk micromachining is constructed demonstrating a compact optical setup. Prealigned microstructures with space for mounting bulk elements are prepared. A 3-D photolithographic technique is applied with good repeatability using an originally developed resist spray-coating system. Films grown by low-pressure chemical-vapor deposition (LPCVD) are used as construction layers combining with 3-D bulk structures. A skew micromirror at the free end of a thermally actuated cantilever is fabricated facing to a laser diode chip. An optical-scan angle of more than 30° and a cutoff frequency of 100 Hz are obtained.

[IEEE ]

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems

Maciej Baranski, Sylwester Bargiel, Nicolas Passilly, Christophe Gorecki, Chenping Jia, Jörg Frömel, and Maik Wiemer
Appl. Opt. 54(22) 6924-6934 (2015)

Static volumetric three-dimensional display based on an electric-field-controlled two-dimensional optical beam scanner

Dewei Gong, Cuanzhi Wang, Xuping Wang, and Zhongxiang Zhou
Appl. Opt. 58(26) 7067-7072 (2019)

One-mirror and two-mirror three-dimensional optical scanners—position and accuracy of laser beam spot

Petr Pokorny
Appl. Opt. 53(12) 2730-2740 (2014)

Effect of temperature on calibration quality of structured-light three-dimensional scanners

M. Adamczyk, M. Kamiński, R. Sitnik, A. Bogdan, and M. Karaszewski
Appl. Opt. 53(23) 5154-5162 (2014)

Non-laser-based scanner for three-dimensional digitization of historical artifacts

Daniel V. Hahn, Kevin C. Baldwin, and Donald D. Duncan
Appl. Opt. 46(15) 2838-2850 (2007)