Abstract
Liquid crystal on silicon (LCOS) for phase-only holography is ideally made
to better optical tolerance than that for conventional amplitude modulating
applications. Die-level assembly is suited to custom devices and
pre-production prototypes because of its flexibility and efficiency in
conserving the silicon backplane. Combined with automated assembly, it will
allow high reproducibility and fast turnaround time, paving the way for
pre-production testing and customer sampling before mass production.
Pre-assembly optical testing is the key element in the process. By taking
into account the flatness of both the backplane and the front glass plate,
we have assembled high quality LCOS devices. We have reached our aim of less
than one quarter wavelength phase distortion across the active area.
© 2010 IEEE
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