Abstract
Phase-shifting interferometry was applied in the double beam shadow
moiré interferometer, and furthermore,this technique used the automatic
measurement system to catch the interferograms and calculated the residual
stress of flexible electronics. As results of the shadow moiré interferometer
were symmetrical, this measurement system was found to be stable and of high
precision. The systematic error was less than 2% when the tolerance of the
CCD view angle was between
$-{{5}}^{\circ}$
and
$+{{5}}^{\circ}$
. Experimental results showed that this technique can precisely
determine a fraction of a fringe with a precision of 0.44% for a rigid specimen.
The stress of a flexible substrate can be evaluated by the modified Stoney
formula. Therefore, the residual stress of tin-doped indium oxide (ITO) films
deposited on a polyethylene terephthalate (PET) was
$-$
744.1 MPa and the measurement tolerance
was
$\pm$
9.4
MPa of 1.26% error.
© 2014 IEEE
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