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Optica Publishing Group
  • Journal of the Optical Society of Korea
  • Vol. 14,
  • Issue 4,
  • pp. 409-414
  • (2010)

Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry

Open Access Open Access

Abstract

This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the <TEX>$2\pi$</TEX> ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.

© 2010 Optical Society of Korea

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