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High-Performance Optical Coatings for VUV Lithography Application

FA1 Optical Interference Coatings (OIC) 2007 View: PDF

EUV multilayer optics at the Fraunhofer IOF

FA2 Optical Interference Coatings (OIC) 2007 View: PDF

Instrument for the Measurement of EUV Reflectance and Scattering – MERLIN

FA3 Optical Interference Coatings (OIC) 2007 View: PDF

X rays reflective multilayers optic for Microbeam Radiation Therapy at the European Synchrotron Radiation Facility

FA4 Optical Interference Coatings (OIC) 2007 View: PDF

Roughness Evolution and Scatter Losses of Multilayers for 193 nm

FA5 Optical Interference Coatings (OIC) 2007 View: PDF

Fluoride antireflection coatings at 193nm by resistive heating boat

FA7 Optical Interference Coatings (OIC) 2007 View: PDF

Reflecting at 30.4 and Antireflecting at 58.4 nm

FA8 Optical Interference Coatings (OIC) 2007 View: PDF

High Reflectivity Multilayer Mirror for He-II Radiation at 30.4nm in Solar Physics Application

FA9 Optical Interference Coatings (OIC) 2007 View: PDF

X-Ray Diffraction Properties of Silica Thin Films Having Single Crystalline Mesoporous Structures

FA10 Optical Interference Coatings (OIC) 2007 View: PDF

Femtosecond Pulse Laser Damage in Thin Films

FB1 Optical Interference Coatings (OIC) 2007 View: PDF

Analysis of material modifications in laser-damaged HfO2 thin films

FB2 Optical Interference Coatings (OIC) 2007 View: PDF

Laser damage resistance of HfO2 thin films deposited by Electron Beam Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering

FB3 Optical Interference Coatings (OIC) 2007 View: PDF

Influence of the laser beam size on the laser-induced damage in thin films and substrates

FB4 Optical Interference Coatings (OIC) 2007 View: PDF

Light intensification modeling of coating inclusions irradiated at 351 and 1053 nm

FB5 Optical Interference Coatings (OIC) 2007 View: PDF

Graded index broadband antireflection coating by glancing angle deposition and its application in laser system

FB6 Optical Interference Coatings (OIC) 2007 View: PDF

Contaminant Resistant Sol-Gel Coatings for High Peak Power Laser Applications

FB7 Optical Interference Coatings (OIC) 2007 View: PDF

Plasma formation and growth initiated by inclusions in nanosecond-pulse-driven damage of optical coatings

FB8 Optical Interference Coatings (OIC) 2007 View: PDF

Charles Keith Carniglia (1944-2006): In Memoriam

MA1 Optical Interference Coatings (OIC) 2007

New Ideas and Developments in the Field of Optical Coatings

MA2 Optical Interference Coatings (OIC) 2007 View: PDF

Process Technology, Applications and Potentials of Magnetron Sputtering Technology for Optical Coatings

MA3 Optical Interference Coatings (OIC) 2007 View: PDF

Flexible High Throughput Deposition of Optical Coatings Using Closed Field Magnetron Sputtering

MA4 Optical Interference Coatings (OIC) 2007 View: PDF

Sputter Deposition of Silicon Oxynitride Gradient and Multilayer Coatings

MA5 Optical Interference Coatings (OIC) 2007 View: PDF

Stationary and In-line Reactive Magnetron Sputter Technologies for Deposition of Optical Coatings

MA6 Optical Interference Coatings (OIC) 2007 View: PDF

2007 OSA Topical Meeting on Optical Interference Coatings Manufacturing Problem

MB1 Optical Interference Coatings (OIC) 2007 View: PDF

Plasma sources for precision optical coatings

MB3 Optical Interference Coatings (OIC) 2007 View: PDF

SiOx, SiNx, SiNxOy Deposited By ICP-CVD System With Optimized Uniformity For Optical Coatings

MB4 Optical Interference Coatings (OIC) 2007 View: PDF

A new process to deposit AlF3 thin films

MB5 Optical Interference Coatings (OIC) 2007 View: PDF

Organic Roll Coating to Form Interference Layers

MB6 Optical Interference Coatings (OIC) 2007 View: PDF

High Power Pulse Magnetron Sputtering: A new process for Industrial High Quality Optical Coatings?

MB7 Optical Interference Coatings (OIC) 2007 View: PDF

Micro/nanostructured optical thin films: potential and applications

MC2 Optical Interference Coatings (OIC) 2007 View: PDF

A Facile, Novel Methodology for Preparation of Multilayer Metal/Polymer Composite Films

MC3 Optical Interference Coatings (OIC) 2007 View: PDF

Stochastic subwavelength structures on polymer surfaces for antireflection purposes

MC4 Optical Interference Coatings (OIC) 2007 View: PDF

Optical resonances in an aligned Al nano-rod array

MC5 Optical Interference Coatings (OIC) 2007 View: PDF

Chemically Prepared Silica Films with Single Crystalline Mesoporous Structures

MD1 Optical Interference Coatings (OIC) 2007 View: PDF

Fabrication of 3-dimension photonic crystal using self assembly and autocloning technologies

MD2 Optical Interference Coatings (OIC) 2007 View: PDF

Graded wave-like two-dimensional photonic crystal made of thin films

MD3 Optical Interference Coatings (OIC) 2007 View: PDF

Simulation of the Re-shaping Process for Auto-cloned Photonic Crystal

MD4 Optical Interference Coatings (OIC) 2007 View: PDF

Surface wave excitation at 1D photonic crystal-metal interface

MD5 Optical Interference Coatings (OIC) 2007 View: PDF

Scanning Force Microscopy of Coatings and Nanostructured Surfaces

MD6 Optical Interference Coatings (OIC) 2007 View: PDF

Study of Ge15Sb20S65 and Te20As30Se50 chalcogenide coatings

MD7 Optical Interference Coatings (OIC) 2007 View: PDF

Investigation of Sn-based Alternatives to Cadmium in Thin Film Coatings

MD8 Optical Interference Coatings (OIC) 2007 View: PDF

Novel UV cross-link coating materials for advanced planarization technology on substrates

MD9 Optical Interference Coatings (OIC) 2007 View: PDF

Properties, growth and filter applications of a-SiNx:H alloys prepared in pulsed radiofrequency plasma

MD10 Optical Interference Coatings (OIC) 2007 View: PDF

Standardized Characterization of Optical Losses from the Ultraviolet to Near-Infrared Range

ThA1 Optical Interference Coatings (OIC) 2007 View: PDF

UV-VIS-NIR Scatter Measurement Methods for Ultra Precision Surfaces and Coatings

ThA2 Optical Interference Coatings (OIC) 2007 View: PDF

From angle resolved ellipsometry of light scattering to imaging in random media

ThA3 Optical Interference Coatings (OIC) 2007 View: PDF

Improved Characterization of Optical Surfaces from Scattered Light Measurements

ThA4 Optical Interference Coatings (OIC) 2007 View: PDF

Characterization of optical coatings with a CCD angular and spatial resolved scatterometer

ThA5 Optical Interference Coatings (OIC) 2007 View: PDF

High-precision measurements of the specular reflectivity

ThA6 Optical Interference Coatings (OIC) 2007 View: PDF

Variations of transmittance with relative humidity in LIL/LMJ polarizer coatings

ThA7 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Loss Analysis of Electro-Optic Polymers through Two-Layer Measurement

ThA8 Optical Interference Coatings (OIC) 2007 View: PDF

Explicit refractive index determination from the envelopes of the ellipsometric magnitude tan(psi)

ThA9 Optical Interference Coatings (OIC) 2007 View: PDF

Characterization of photocatalytic activity of TiO2 thin films for optical applications

ThA10 Optical Interference Coatings (OIC) 2007 View: PDF

Measurement Problem

ThB1 Optical Interference Coatings (OIC) 2007 View: PDF

Elastic and Plastic Deformation of Densified SiO2 Films

ThB2 Optical Interference Coatings (OIC) 2007 View: PDF

Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation

ThB3 Optical Interference Coatings (OIC) 2007 View: PDF

Characterizing Multilayer, Low Diattenuation Mirrors With a Mueller Matrix Imaging Polarimeter

ThB4 Optical Interference Coatings (OIC) 2007 View: PDF

Stoichiometry monitor in plasma assisted deposition using optical spectroscopy

ThB5 Optical Interference Coatings (OIC) 2007 View: PDF

Efficiency of polarimetric z-probing within optical multilayer

ThB6 Optical Interference Coatings (OIC) 2007 View: PDF

Phase Dispersion of Coatings in the Beam Combiner of a Stellar Interferometer

ThB7 Optical Interference Coatings (OIC) 2007 View: PDF

Measurement of the mechanical properties of TiO2 thin films deposited by electron beam evaporation

ThB8 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Coating Technology Developed for Flexible Concentrator Space Power Arrays

ThC1 Optical Interference Coatings (OIC) 2007 View: PDF

Optical optimization of organic solar cells

ThC2 Optical Interference Coatings (OIC) 2007 View: PDF

High-Contrast OLED with Microcavity Effect

ThC3 Optical Interference Coatings (OIC) 2007 View: PDF

Metal-Dielectric Selective Reflecting Filter for Mini-Projectors

ThC4 Optical Interference Coatings (OIC) 2007 View: PDF

Transparent Conductive Materials for Art Protection Glass

ThC6 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Interference Coatings for Femtosecond Nonlinear Microscopy

ThC7 Optical Interference Coatings (OIC) 2007 View: PDF

An available optical thin film demultiplexer based on superprism effect

ThC8 Optical Interference Coatings (OIC) 2007 View: PDF

A model to calculate the performance of halogen burners with InfraRed Reflecting multilayer coatings

ThC9 Optical Interference Coatings (OIC) 2007 View: PDF

Progress and Challenges Developing a Coating for Next Generation Gravitational-wave Detectors

ThC10 Optical Interference Coatings (OIC) 2007 View: PDF

Characterization of Low Level Losses in Optical Thin Films

ThD1 Optical Interference Coatings (OIC) 2007 View: PDF

Investigation of Ion-Beam-Sputtered Silica-Titania Mixtures for Use in Gravitational Wave Interferometer Optics

ThD2 Optical Interference Coatings (OIC) 2007 View: PDF

Antireflection Coatings for Astronomical Silicon Imagers

ThD3 Optical Interference Coatings (OIC) 2007 View: PDF

Antireflection coating AR-hard with UV-protective properties for polycarbonate

ThD4 Optical Interference Coatings (OIC) 2007 View: PDF

Anti-Reflective Coatings On Plastic Substrates

ThD5 Optical Interference Coatings (OIC) 2007 View: PDF

Adhesion enhancement by surface pretreatment with argon-helium plasma for antireflection coating on TAC

ThD6 Optical Interference Coatings (OIC) 2007 View: PDF

Antireflection Coatings for Improvement of Longitudinal Magneto-Optic Kerr Effect Contrast

ThD7 Optical Interference Coatings (OIC) 2007 View: PDF

Anti-Reflection Coating of Diamond, For Use at Elevated Temperatures

ThD8 Optical Interference Coatings (OIC) 2007 View: PDF

Preparation of MgF2-SiO2 Thin Films with Low Refractive Index by Sol-gel Process

ThD9 Optical Interference Coatings (OIC) 2007 View: PDF

Sol-gel coatings ageing in LIL Pockels cells

ThD10 Optical Interference Coatings (OIC) 2007 View: PDF

Investigations of MgF2 optical thin films with ultra-low refractive indices prepared from autoclaved sols

ThD11 Optical Interference Coatings (OIC) 2007 View: PDF

Nanoamorphous Optical Coatings

TuA1 Optical Interference Coatings (OIC) 2007 View: PDF

Optical and Structural Properties of LaF3 Thin Films

TuA2 Optical Interference Coatings (OIC) 2007 View: PDF

Residual Stress and Optical Properties of TiO2 Thin Film during Annealing by Different Deposition Methods

TuA4 Optical Interference Coatings (OIC) 2007 View: PDF

Crystal Phase Transition of HfO2 Films Evaporated by Plasma Ion-Assisted Deposition

TuA5 Optical Interference Coatings (OIC) 2007 View: PDF

Applications of Mixture Oxide Materials for fs Optics

TuA6 Optical Interference Coatings (OIC) 2007 View: PDF

Extension of Ion Beam Sputtered Oxide Mixtures into the UV Spectral Range

TuA7 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Properties of TiO2 – SiO2 Mixture Thin Films Produced by Ion-Beam Sputtering

TuA8 Optical Interference Coatings (OIC) 2007 View: PDF

Increasing application potential of titanium oxide based mixed materials for optical interference coatings on mineral glasses and plastics

TuA9 Optical Interference Coatings (OIC) 2007 View: PDF

Microstructure determination of porous Si:H samples by reflectance methods

TuA10 Optical Interference Coatings (OIC) 2007 View: PDF

Mechanical Properties of Thin Films

TuB1 Optical Interference Coatings (OIC) 2007 View: PDF

All Dielectric Low Wavefront Distortion Polarization Insensitive Beamsplitters

TuB2 Optical Interference Coatings (OIC) 2007 View: PDF

Residual stress of rugate filter made with Ta2O5-SiO2 composite thin films by RF ion-beam sputtering

TuB3 Optical Interference Coatings (OIC) 2007 View: PDF

Stress measurement of Al film deposited on flexible substrates by shadow moiré method

TuB4 Optical Interference Coatings (OIC) 2007 View: PDF

Stress Compensation in Fluoride Coatings for the VUV Spectral Range

TuB5 Optical Interference Coatings (OIC) 2007 View: PDF

Residual Stress of Obliquely Deposited MgF2 Thin Films

TuB6 Optical Interference Coatings (OIC) 2007 View: PDF

Optical properties and residual stress of YbF3 thin films deposited at different temperatures

TuB7 Optical Interference Coatings (OIC) 2007 View: PDF

Long Term Stability of Low Index Mixed Fluorides

TuB8 Optical Interference Coatings (OIC) 2007 View: PDF

Manufacture of High Performance Polarizing Beam Splitter for Projection Display Applications

TuC1 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Filters, Reflectors, and Polarizers Fashioned with Periodic Leaky-Mode Resonant Layers

TuC2 Optical Interference Coatings (OIC) 2007 View: PDF

All-dielectric front-surface wide-angle and broadband non-polarizing parallel plate beam splitter

TuC3 Optical Interference Coatings (OIC) 2007 View: PDF

Influences of the incident angle, orientation of deposition plane and film thickness on a polarization conversion reflection filter

TuC5 Optical Interference Coatings (OIC) 2007 View: PDF

Polarization state modulation for the reflected ray from an anisotropic thin film

TuC7 Optical Interference Coatings (OIC) 2007 View: PDF

Positive and negative spatial dispersion effects of optical thin films

TuC8 Optical Interference Coatings (OIC) 2007 View: PDF

Using Phisweep technique to sculpture anisotropic optical thin films

TuC9 Optical Interference Coatings (OIC) 2007 View: PDF

Tools for Improving Precision Optical Coatings Through E-Beam Sweep Design

TuCPDP1 Optical Interference Coatings (OIC) 2007 View: PDF

Narrowband multichannel filters and integrated optical filter arrays

TuD1 Optical Interference Coatings (OIC) 2007 View: PDF

Implementation of Long-Wavelength Cut-off Filters Based on Critical Angle

TuD2 Optical Interference Coatings (OIC) 2007 View: PDF

Rugate Filter with Specified Bandwidth: a New Rule of Thumb

TuD3 Optical Interference Coatings (OIC) 2007 View: PDF

Photosensitive bandpass filters

TuD4 Optical Interference Coatings (OIC) 2007 View: PDF

Wide Spectrum Transmission Filters for Image Spectrometry from Space

TuD5 Optical Interference Coatings (OIC) 2007 View: PDF

Completely Blocked Ultra Violet Filters

TuD6 Optical Interference Coatings (OIC) 2007 View: PDF

A Hitless Tunable Filter Using Optical Multilayer Films for ROADM System

TuD7 Optical Interference Coatings (OIC) 2007 View: PDF

Optical filters with constant optical thickness and refined refractive indices

TuD8 Optical Interference Coatings (OIC) 2007 View: PDF

Preparation and characterization of free-standing Zr filter for soft X-ray laser application

TuD9 Optical Interference Coatings (OIC) 2007 View: PDF

Mid-Infrared Filters for the Diviner Radiometer Experiment on the Lunar Reconnaissance Orbiter (7-40µm)

TuDPDP1 Optical Interference Coatings (OIC) 2007

Optimization of TiO2 films prepared by reactive electron beam evaporation of Ti3O5

TuEPDP1 Optical Interference Coatings (OIC) 2007 View: PDF

A novel Atomic Layer Deposition process for depositing metal fluoride thin films

TuEPDP2 Optical Interference Coatings (OIC) 2007 View: PDF

Advantages of Radio Frequency Plasma Enhanced Evaporation Compared To Other Coating Techniques

TuEPDP3 Optical Interference Coatings (OIC) 2007 View: PDF

Mixed flowing gas testing of silver mirror coatings

TuEPDP5 Optical Interference Coatings (OIC) 2007 View: PDF

Pre-Production Analysis of Optical Coating Manufacturability

WA1 Optical Interference Coatings (OIC) 2007 View: PDF

Design Opportunities for Better Manufacturability

WA2 Optical Interference Coatings (OIC) 2007 View: PDF

Reverse Engineering of Fabricated Coatings Using Off-Line, and On-Line Photometric Data

WA3 Optical Interference Coatings (OIC) 2007 View: PDF

Monitoring and Control of Optical Thin Film “Fencepost” Designs of Various Types

WA4 Optical Interference Coatings (OIC) 2007 View: PDF

Design of Complex Rugate Filters

WA5 Optical Interference Coatings (OIC) 2007 View: PDF

Designing High-Efficiency Interference Coatings With Atomic Layer Deposited TiO2 Layers

WA6 Optical Interference Coatings (OIC) 2007 View: PDF

Designing phase-sensitive mirrors by minimizing complex error energy in the frequency domain

WA7 Optical Interference Coatings (OIC) 2007 View: PDF

Advanced dispersive optics for the VIS-IR range

WA9 Optical Interference Coatings (OIC) 2007 View: PDF

Design of Attenuated Phase-shift Masks for Extreme Ultraviolet Lithography with High Inspection Contrast in Deep Ultraviolet Regime

WA10 Optical Interference Coatings (OIC) 2007 View: PDF

OIC 2007: Design Problem Results

WB1 Optical Interference Coatings (OIC) 2007

Design of Multilayer Coatings with Specific Angular Dependencies of Color Properties

WB2 Optical Interference Coatings (OIC) 2007 View: PDF

Theoretical Notes on One Magic Reflectance Value

WB3 Optical Interference Coatings (OIC) 2007 View: PDF

Design, fabrication and reverse engineering of broad band chirped mirrors

WB4 Optical Interference Coatings (OIC) 2007 View: PDF

Structural Properties of Antireflection Coatings

WB5 Optical Interference Coatings (OIC) 2007 View: PDF

OpenFilters: an open source software for the design and optimization of optical coatings

WB6 Optical Interference Coatings (OIC) 2007 View: PDF

Applications of a Genetic and Simplex Algorithm based Hybrid Algorithm in Optical Film Design and Optimization

WB7 Optical Interference Coatings (OIC) 2007 View: PDF

Optical Interference Coating Design with DGL Global Optimization Algorithms

WB8 Optical Interference Coatings (OIC) 2007 View: PDF

Optimization of Optical Monitoring of Non-quarterwave stacks Using Admittance

WC1 Optical Interference Coatings (OIC) 2007 View: PDF

Monitoring Strategy Combining the Advantages of Direct and Indirect Optical Monitoring

WC2 Optical Interference Coatings (OIC) 2007 View: PDF

Direct Optical Monitoring Enables High Performance Applications in Mass Production

WC3 Optical Interference Coatings (OIC) 2007 View: PDF

In-situ Monitoring and Deposition Control of a Broadband Multilayer Dichroic Filter.

WC4 Optical Interference Coatings (OIC) 2007 View: PDF

An error compensation strategy for Broadband Optical Monitoring

WC5 Optical Interference Coatings (OIC) 2007 View: PDF

Sensitive optical monitoring with error compensation

WC6 Optical Interference Coatings (OIC) 2007 View: PDF

Monitoring of multilayer by admittance diagram

WC7 Optical Interference Coatings (OIC) 2007 View: PDF

Analysis of Dip Coating Processing Parameters by Double Optical Monitoring

WC8 Optical Interference Coatings (OIC) 2007 View: PDF

Multi-wavelength optical monitoring for infrared complex functions: Application to process improvement

WC9 Optical Interference Coatings (OIC) 2007 View: PDF

On-line re-engineering of interference coatings

WC10 Optical Interference Coatings (OIC) 2007 View: PDF

Constructing multilayers with absorbing materials

WD1 Optical Interference Coatings (OIC) 2007 View: PDF

Comparison of thermal shifts in resonant grating waveguide structures and multilayer stacks

WD2 Optical Interference Coatings (OIC) 2007 View: PDF

Spatial Beam Switching by Thermal Tuning of a Hybrid Organic-Inorganic Thin-Film Stack

WD3 Optical Interference Coatings (OIC) 2007 View: PDF

Determination of thermal and elastic coefficients of optical thin-film materials

WD4 Optical Interference Coatings (OIC) 2007 View: PDF

Prism coupling measurement of part-per-million extinction in an optical thin film during and after deposition

WD5 Optical Interference Coatings (OIC) 2007 View: PDF

Characterization of low losses in Optical Thin Films and Materials

WD6 Optical Interference Coatings (OIC) 2007 View: PDF

Coefficient of thermal expansion and biaxial modulus of thin films on a thin substrate

WD7 Optical Interference Coatings (OIC) 2007 View: PDF

Precise and Practical Measurement of Weak Absorption for Optical Coatings

WD8 Optical Interference Coatings (OIC) 2007 View: PDF

Cooled Infrared Dichroic Beamsplitters and Filters for the MIRI Spectrometer and Imager (5-29μm)

WDPDP1 Optical Interference Coatings (OIC) 2007 View: PDF

Optical characterization of thin metal films

WDPDP2 Optical Interference Coatings (OIC) 2007 View: PDF

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