Abstract

Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.

© 2020 Chinese Laser Press

Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings

Kang Xu, Lingyu Huang, and Shaolin Xu
Optica 10(1) 97-104 (2023)

Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

Yuchan Zhang, Qilin Jiang, Kaiqiang Cao, Tianqi Chen, Ke Cheng, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, and Jianrong Qiu
Photon. Res. 9(5) 839-847 (2021)

Large area uniform nanostructures fabricated by direct femtosecond laser ablation

Min Huang, Fuli Zhao, Ya Cheng, Ningsheng Xu, and Zhizhan Xu
Opt. Express 16(23) 19354-19365 (2008)

Optical absorption of two dimensional periodic microstructures on ZnO crystal fabricated by the interference of two femtosecond laser beams

Xin Jia, Tianqing Jia, Yi Zhang, Pingxin Xiong, Donghai Feng, Zhenrong Sun, and Zhizhan Xu
Opt. Express 18(14) 14401-14408 (2010)

Formation of uniform two-dimensional subwavelength structures by delayed triple femtosecond laser pulse irradiation

Sohail A. Jalil, Jianjun Yang, Mohamed Elkabbash, Yuhao Lei, Wanlin He, and Chunlei Guo
Opt. Lett. 44(9) 2278-2281 (2019)