Abstract

Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter.

© 2017 Chinese Laser Press

Precision Fe i and Fe ii wavelengths in the ultraviolet spectrum of the iron–neon hollow-cathode lamp

G. Nave, R. C. M. Learner, A. P. Thorne, and C. J. Harris
J. Opt. Soc. Am. B 8(10) 2028-2041 (1991)

Direct calibration of laser wavelength and bandwidth using the optogalvanic effect in hollow cathode lamps

David S. King, Peter K. Schenck, Kermit C. Smyth, and John C. Travis
Appl. Opt. 16(10) 2617-2619 (1977)

Interferometric Wavelengths of Iron Lines from a Hollow Cathode Discharge*

R. W. Stanley and G. H. Dieke
J. Opt. Soc. Am. 45(4) 280-286 (1955)

Hollow Iron Cathode Discharge as Source for Wavelength and Intensity Standards*

H. M. Crosswhite, G. H. Dieke, and C. Salmon Legagneur
J. Opt. Soc. Am. 45(4) 270-280 (1955)

Dysprosium optogalvanic spectroscopy in a hollow cathode lamp

Jhonatha Ricardo dos Santos, Patrícia Bueno, Jonas Jakutis, Alessandro R. Victor, Luiz F. N. Barreta, Maria Esther Sbampato, José W. Neri, Carlos A. B. Silveira, Nicolau A. S. Rodrigues, and Marcelo Geraldo Destro
J. Opt. Soc. Am. B 40(5) 1141-1147 (2023)