Combinatorial approach toward optimization of the light emission intensity of AlOxNy:Yb3+ thin films

K. Y. Tucto; W. Aponte; J. A. Dulanto; J. A. Töfflinger; J. A. Guerra; R. Grieseler

doi:10.1364/AO.58.003097

Applied Optics
Vol. 58,
Issue 12,
pp. 3097-3103
(2019)
•https://doi.org/10.1364/AO.58.003097

Combinatorial approach toward optimization of the light emission intensity of AlO_xN_y:Yb³⁺ thin films

K. Y. Tucto, W. Aponte, J. A. Dulanto, J. A. Töfflinger, J. A. Guerra, and R. Grieseler

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K. Y. Tucto, W. Aponte, J. A. Dulanto, J. A. Töfflinger, J. A. Guerra, and R. Grieseler, "Combinatorial approach toward optimization of the light emission intensity of AlO_xN_y:Yb³⁺ thin films," Appl. Opt. 58, 3097-3103 (2019)

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Abstract

To obtain an adequate luminescent emission, a significant effort must be made to find a suitable host material. An interesting and highly efficient method is a combinatorial approach, which allows high velocity screening of a wider range of properties. In the present work, a compositional gradient-based, thin-film library of $a - {AlO}_{x} N_{y} : {Yb}^{3 +}$ has been prepared by radio frequency co-sputtering from two targets. The ytterbium concentration range spreads from 0.9 to 4.2 at. % and the oxygen to nitrogen ratio from 0.6 to 3.6. Using different annealing temperatures, the activation energy of the rare earth ions and activation mechanisms can be evaluated. Finally, optimal elemental compositions in the investigated range are proposed.

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Sample	Thickness (nm)	$A_{0}$	$A_{1}$ ( $\times 10^{3} {nm}^{2}$ )
${AlO}_{x} N_{y} 1$	$872 \pm 1.4$	$1.48 \pm 0.02$	$12.01 \pm 0.20$
${AlO}_{x} N_{y} 2$	$605 \pm 0.5$	$1.57 \pm 0.01$	$5.76 \pm 0.11$
${AlO}_{x} N_{y} 3$	$316 \pm 0.4$	$1.59 \pm 0.01$	$1.54 \pm 0.23$

	Composition (at. %)				$n$ (633 nm)	Thickness (nm)
	Al	O	N	$O : N$	$n$ (633 nm)	Thickness (nm)
	31	49	19	2.5	1.51	872
	30	52	17	3.0	1.58	605
	32	53	14	3.7	1.59	316
	Bandgap (eV)			Urbach energy (meV)
$O : N$	B.F	Tauc		BF		Urbach rule
2.5	$5.74 \pm 0.21$	$4.61 \pm 0.03$		$603.3 \pm 0.1$		$537.2 \pm 0.1$
3.0	$5.92 \pm 0.08$	$4.74 \pm 0.02$		$519.7 \pm 0.1$		$576.2 \pm 0.6$
3.7	$6.55 \pm 0.19$	$4.83 \pm 0.01$		$573.8 \pm 0.3$		$716.2 \pm 0.3$

Sample	Thickness (nm)	$A_{0}$	$A_{1}$ ( $\times 10^{3} {nm}^{2}$ )
${AlO}_{x} N_{y} 1$	$872 \pm 1.4$	$1.48 \pm 0.02$	$12.01 \pm 0.20$
${AlO}_{x} N_{y} 2$	$605 \pm 0.5$	$1.57 \pm 0.01$	$5.76 \pm 0.11$
${AlO}_{x} N_{y} 3$	$316 \pm 0.4$	$1.59 \pm 0.01$	$1.54 \pm 0.23$

	Composition (at. %)				$n$ (633 nm)	Thickness (nm)
	Al	O	N	$O : N$	$n$ (633 nm)	Thickness (nm)
	31	49	19	2.5	1.51	872
	30	52	17	3.0	1.58	605
	32	53	14	3.7	1.59	316
	Bandgap (eV)			Urbach energy (meV)
$O : N$	B.F	Tauc		BF		Urbach rule
2.5	$5.74 \pm 0.21$	$4.61 \pm 0.03$		$603.3 \pm 0.1$		$537.2 \pm 0.1$
3.0	$5.92 \pm 0.08$	$4.74 \pm 0.02$		$519.7 \pm 0.1$		$576.2 \pm 0.6$
3.7	$6.55 \pm 0.19$	$4.83 \pm 0.01$		$573.8 \pm 0.3$		$716.2 \pm 0.3$

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Applied Optics