Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Long-range in situ picometer measurement of the period of an interference field

Not Accessible

Your library or personal account may give you access

Abstract

A scanning reference grating (SRG) method is proposed for high-precision in situ measuring and controlling the period of a long-range interference field. The reference grating is produced with the in situ interference field; then it is used to obtain phase shift signal when scanning in the interference field. With the phase shift signal collected by the SRG system, before the exposure process of the holographic grating fabrication, the period and the period uniformity of the holographic grating can be evaluated directly from the interference field; then optical adjustment can be applied until the grating period is tuned to any certain desired value. Experiments of measurement and adjustment are conducted, and an interference field with period value of 833.335nm±10pm in 60 mm range is reached. The proposed method gives an efficient way to fabricate large gratings of an accurate period; furthermore, it provides a reliable tool that may lead us to picometer-level optical metrology and fabrication for the most advanced lithographic equipment and in other scientific fields.

© 2019 Optical Society of America

Full Article  |  PDF Article
More Like This
Heterodyne period measurement in a scanning beam interference lithography system

Shan Jiang, Bo Lü, Ying Song, Zhaowu Liu, Wei Wang, Li Shuo, and Bayanheshig
Appl. Opt. 59(19) 5830-5836 (2020)

Precision fringe period metrology using an LSQ sine fit algorithm

Xiansong Xiang, Minkang Li, Chunlong Wei, and Changhe Zhou
Appl. Opt. 57(17) 4777-4784 (2018)

Picometer-differential twice-exposed element for three-dimensional measurement with extremely long depth of field

Chao Li, Changhe Zhou, Yunkai Lu, Chaofeng Miao, Junjie Yu, Zhengkun Yin, and Jin Ye
Appl. Opt. 59(17) 5234-5239 (2020)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (18)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved