Abstract

We fabricated a silicon micropore optic using deep reactive ion etching and coated by Pt with atomic layer deposition (ALD). We confirmed that a metal/metal oxide bilayer of ${\mathrm{Al}}_2{\mathrm{O}}_3\sim 10\mathrm{nm}$ and Pt $\sim 20\mathrm{nm}$ was successfully deposited on the micropores whose width and depth are 20 μm and 300 μm, respectively. An increase of surface roughness of sidewalls of the micropores was observed with a transmission electron microscope and an atomic force microscope. X-ray reflectivity with an Al $\mathrm{K}\alpha$ line at 1.49 keV before and after the deposition was measured and compared to ray-tracing simulations. The surface roughness of the sidewalls was estimated to increase from $1.6\pm 0.2\mathrm{nm}$ rms to $2.2\pm 0.2\mathrm{nm}$ rms. This result is consistent with the microscope measurements. Post annealing of the Pt-coated optic at 1000°C for 2 h showed a sign of reduced surface roughness and better angular resolution. To reduce the surface roughness, possible methods such as the annealing after deposition and a plasma-enhanced ALD are discussed.

© 2018 Optical Society of America

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