Abstract

The ellipsometer described herein uses a He–Ne laser as monochromatic light source, and, in the analysis system, a sensitive elliptic detector namely the Bravais-Zakrzewski-Perucca biplate. The use of this biplate allows better accuracy in measurements. Furthermore, a method of measuring and evaluating the results is described which includes, but is not limited to, conventional methods.

© 1969 Optical Society of America

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