Abstract

Source optimization (SO) is an extensively used resolution enhancement technique in optical lithography. To improve computational efficiency, compressive sensing (CS) theory was applied to SO for clip-level applications in previous works. We propose, for the first time to our knowledge, a multi-objective adaptive SO (adaptive-MOSO) with CS for full chip. The fast optimization of a pixel illumination source pattern is achieved, and the imaging fidelity of each clip is guaranteed simultaneously at full chip. Fast CS with contour sampling is applied to accelerate the SO procedure by sampling all layout patterns. Novel cost function with adaptive weight distribution for every single clip is established to guarantee the lithography imaging fidelity for full chip. The simulation results prove that the adaptive-MOSO method improves the efficiency of SO and the lithography performance for large-scale chips.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning

Yiyu Sun, Yanqiu Li, Tie Li, Xu Yan, Enze Li, and Pengzhi Wei
Opt. Express 27(22) 32733-32745 (2019)

Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field

Tie Li, Yiyu Sun, Enze Li, Naiyuan Sheng, Yanqiu Li, Pengzhi Wei, and Yang Liu
Opt. Express 27(11) 15604-15616 (2019)

Lithography-defect-driven source-mask optimization solution for full-chip optical proximity correction

Austin Peng, Stephen D. Hsu, Rafael C. Howell, and Qinglin Li
Appl. Opt. 60(3) 616-620 (2021)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription