Abstract

Phase imaging is an important measurement method in optical metrology, and phase extraction is one of its essential components. A method using one-frame dual-wavelength interferometry (DWI) for fast phase extraction is proposed. Using this method, the Hilbert transform (HT) is applied twice to a wavelength-multiplexed interferogram to obtain two images. The HT is then applied twice to the sum of the squares of these two images. The synthetic wavelength phase can then be obtained. Compared with other common multiple-frame DWI methods, the proposed approach requires only one multiplexed interferogram and does not have to consider parameter changes in interferograms of different frames. Furthermore, the proposed method was determined to require the least calculation time, and the simulation and experimental results confirmed its high accuracy and efficiency. It suggests that the proposed method is suitable for real-time measurements.

© 2021 Optical Society of America

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