Abstract

This paper describes the construction and performance of a computer-operated following ellipsometer. By modifying a conventional ellipsometer and operating it with a process control computer, the polarizer and analyzer null positions can he located in about one second with a resolution of 0.01°. This instrument has been used successfully for in situ studies of the buildup and removal of thin anodic oxide films. As the growth of a film is monitored, the computer also plots the null positions of an X-Y recorder and stores all the experimental data for later printing, punching on cards, or replotting along with theoretical curves.

© 1967 Optical Society of America

Design and operation of an automated, high-temperature ellipsometer

Y. J. van der Meulen and N. C. Hien
J. Opt. Soc. Am. 64(6) 804-811 (1974)

Calculated Reflectance of Aluminum-Overcoated Iridium in the Vacuum Ultraviolet from 500 Å to 2000 Å

G. Hass and W. R. Hunter
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A Computer Method for the Automatic Reduction of Spectroscopic Data

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