Abstract

A novel Fabry–Perot (F–P) demodulation technique based on least square fitting for arbitrary reflectivity F–P sensors is proposed. The demodulation method was simulated and analyzed to verify feasibility of the algorithm. Two different finesse F–P interferometers constructed with a reflector bracket were used to make the stability experiments and the stepping experiments. The results show that the demodulation technique can interrogate the cavity length of F–P interferometers with different fineness in a wide range, and the demodulation error is less than 12 nm.

© 2020 Optical Society of America

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