Abstract
We recently presented a novel unimorph deformable mirror which allows for dynamic focus shift with an actuation rate of 2 kHz. Such mirrors suffer from hysteresis and creep. Therefore, they have to be operated in closed-loop. For this purpose, we developed a defocus sensor based on an astigmatic detection system. In this paper, we present the sensor design and discuss its performance.
© 2020 Optical Society of America
Full Article | PDF ArticleMore Like This
Sven Verpoort, Matthias Bittner, and Ulrich Wittrock
Appl. Opt. 59(23) 6959-6965 (2020)
Zhanbin Fan, Yifan Dai, Chaoliang Guan, Guipeng Tie, Chao Qi, and Yaoyu Zhong
Appl. Opt. 57(21) 6102-6109 (2018)
Phillip A. Himmer, David L. Dickensheets, and Robert A. Friholm
Opt. Lett. 26(16) 1280-1282 (2001)