Abstract
The measurement of aspheric surfaces is very difficult and challenging. An optical system with a single coated lens is proposed for measuring large-aperture aspheric convex/concave surfaces. In this system, the first surface of the compensator is used as an auto-collimation surface, which can realize high-precision null compensation. Based on the third-order aberration theory, the initial design parameters of the system are obtained by analytical calculation, and the parameters are then optimized numerically. An oblate spheroid with an equivalent aperture of 426 mm is taken as an example, and the measuring accuracy of the proposed method can achieve ${0.0063}\lambda$ rms.
© 2020 Optical Society of America
Full Article |
PDF Article
More Like This
References
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Tables (3)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Equations (15)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription
Metrics
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access OSA Member Subscription