Abstract

The principal motivation for this paper is to reduce stray light and line roughness in concave holographic gratings (CHG). Compared with other previously reported line-smoothing grating techniques such as dynamic-exposure near-field holography, we successfully improve the line smoothing of CHG to approximately 10 nm from 2 nm. Our method uses optimization technologies and a combination of photoresist hot-melting (PHM) and oxygen-ion ashing (OIA), thereby improving the degree of stray light before and after optimization by one order of magnitude; the level processed by OIA, PHM, and OIA successively is ${7.85} \times {{10}^{ - 5}}$. Combining the two technologies, we achieve lower stray light and straighter groove lines for the concave gratings, which is more effective, easy to implement, and incurs a low cost.

© 2020 Optical Society of America

Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask

Hui Lin and Lifeng Li
Appl. Opt. 47(33) 6212-6218 (2008)

Fabrication of high-efficiency and low-stray-light grating by inductively coupled plasma(ICP) etching-polishing method

X. Tan, Q. B. Jiao, X. D. Qi, and H. Bayan
Opt. Express 24(6) 5896-5910 (2016)

Low-stray-light gratings fabricated with scanning exposure method based on Lloyd’s mirror for a high-contrast near-eye display in augmented reality

Chenlu Xu, Yuxuan Zhao, and Lijiang Zeng
Appl. Opt. 61(19) 5626-5632 (2022)

Blazed gratings with both controllable blaze angle and anti-blaze angle fabricated by using a twice oblique ion beam etching method

Di Zhang, Xinyu Mao, and Lijiang Zeng
Appl. Opt. 61(33) 9972-9978 (2022)

High diffraction efficiency varied-line-space concave gratings for the Lyman ultraviolet explorer

Tao Ren, Keqiang Qiu, Angran Li, Shuhu Huan, Zheng Lou, Li Ji, ShuagYing Li, and Yilin Hong
Appl. Opt. 62(35) 9414-9421 (2023)