Author Affiliations

Masahiko Ishino,^1,2,* Thanh-Hung Dinh,^1,2 Yuji Hosaka,^2,3 Noboru Hasegawa,¹ Kimio Yoshimura,^2,3 Hiroki Yamamoto,^2,3 Tadashi Hatano,⁴ Takeshi Higashiguchi,⁵ Kazuyuki Sakaue,⁶ Satoshi Ichimaru,⁷ Masatoshi Hatayama,⁷ Akira Sasaki,^1,2 Masakazu Washio,^2,8 Masaharu Nishikino,^1,2 and Yasunari Maekawa^2,3

¹Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology, Kizugawa, Kyoto 619-0215, Japan

²Group of EUV Ultra-precision Technology, QST Advanced Study Laboratory, Inage, Chiba 263-8555, Japan

³Takasaki Advanced Radiation Research Institute, National Institutes for Quantum and Radiological Science and Technology, Takasaki, Gunma 370-1292, Japan

⁴Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai, Miyagi 980-8577, Japan

⁵Department of Electrical and Electric Engineering, Faculty of Engineering, Utsunomiya University, Utsunomiya, Tochigi 321-8585, Japan

⁶Photon Science Center, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan

⁷NTT Advanced Technology Co., Atsugi, Kanagawa 243-0124, Japan

⁸Research Institute for Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan

^*Corresponding author: ishino.masahiko@qst.go.jp

ORCID

Masahiko Ishino	https://orcid.org/0000-0002-6505-0661
Takeshi Higashiguchi	https://orcid.org/0000-0003-3940-7126
Kazuyuki Sakaue	https://orcid.org/0000-0001-7517-0352