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Chromatic confocal displacement sensing at oblique incidence angles

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Abstract

A commercial chromatic confocal displacement sensor, designed for probing a target at normal incidence, is adapted to probe reflective targets at an oblique incidence angle. The sensor is modified by positioning two low-cost optical elements—a collimating lens and a retro-reflector—in the reflection plane.

© 2020 Optical Society of America

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