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Moiré–Ronchigram analysis applied in the characterization of aberration surfaces and optical surface parameters from 3D wavefronts

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Abstract

In this work, we propose the construction of the Moiré-Ronchigram as a pattern obtained from simple Ronchigrams, superposed and with a slight degree of rotation, to obtain a 3D wavefront. The aberrations in the obtained wavefront are fitted to the aberration Zernike polynomial of degree 12 in order to obtain a polynomial expression of a high degree of efficiency, which is subsequently compared with the general equation of quadrics (considering the coefficients accordingly) to obtain essential parameters (as focus, eccentricity, or F number) that allow us to understand and manipulate the optical elements under test optimally. Finally, we compare our results analyzing optical surfaces to make a weak statistic of our proposed method.

© 2019 Optical Society of America

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