Abstract

A chip-scale refractive index sensor based on multiple Fano resonances is proposed by using a metal-insulator-metal (MIM) structure, which is constructed by two side-coupled semi-ring cavities and a vertical cavity. The finite-difference time-domain method and multimode interference coupled-mode theory are employed to simulate and analyze the transmission spectra of this structure, respectively. First, dual Fano resonances are generated in the MIM structure with a baffle and a semi-ring cavity. By arranging two additional cavities, the mode interferences successfully induce up to six ultra-sharp and asymmetrical Fano peaks. The calculated sensing performances are available with ultra-high sensitivity of 1405 nm/RIU and figure of merit of 3.62×105. This chip-scale refractive index sensor may have great applications in highly integrated photonic circuits.

© 2019 Optical Society of America

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