Abstract

In addition to surface roughness and shape precision, the subsurface damage (SSD) generated by single point diamond turning (SPDT) of Ge and Si crystal optics is of increasing importance with decreasing wavelength from infrared through visible, UV, and x-ray. There are various components of SSD, e.g., microcracks, dislocations, strain, and a near-surface amorphous layer, and there are also several techniques to evaluate various components of SSD. Cross-sectional transmission electron microscopy (XTEM) is expensive and not often directly used in the optics laboratory. However, because of its very high sensitivity to SSD and down to atomic resolution, it is often used as an external service for developing SPDT technology and other surface processing techniques. It is shown in the paper that improper sample preparation can generate near-surface amorphization. Measures to avoid this artifact and a test of reliability of XTEM sample preparation are proposed.

© 2018 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Subsurface damage in some single crystalline optical materials

Joseph A. Randi, John C. Lambropoulos, and Stephen D. Jacobs
Appl. Opt. 44(12) 2241-2249 (2005)

Practical splicing of poly-methyl-methacrylate plastic optical fibers

Michele C. Zanon, Vinicius N. H. Silva, Andrés P. L. Barbero, and Ricardo M. Ribeiro
Appl. Opt. 57(4) 812-816 (2018)

Unimorph deformable mirror with an integrated strain feedback layer

Zhanbin Fan, Yifan Dai, Chaoliang Guan, Guipeng Tie, Chao Qi, and Yaoyu Zhong
Appl. Opt. 57(21) 6102-6109 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription