Abstract

In this study, an experiment of a CCD detector irradiated by a 1.06 μm continuous laser is established. Factors including the microlens focusing beam, microlens carbonization at high temperature, shading aluminum film opening rate, low shading aluminum film absorption rate, and different materials’ absorption to the laser are comprehensively considered. By combining the irradiation time, the output image of the CCD detector, surface morphology of the damage area, the optical micrograph, and regional energy spectrogram, the damage mechanism of the CCD is explored. In addition, the threshold time and the damage morphology of the multilayer structure of the CCD detector are investigated. The results show that when the irradiation time increases, the damage starts from the microlens due to melting, which is represented as point damage. Subsequently, the aluminum film melts and is separated from the SiO2 by stress and melting damage, causing vertical bright linear damage. Without the protection of the shading aluminum film, the silicon electrode heats up and reaches the melting point, causing damage to the wiring circuit, which is represented as horizontal dark linear damage. Eventually, the N–Si layer in the silicon substrate melts and the clock signal is destroyed, which means that the optical signal is not converted into an electrical signal. The CCD detector gets completely damaged.

© 2018 Optical Society of America

Full Article  |  PDF Article
More Like This
Mechanisms for the millisecond laser-induced functional damage to silicon charge-coupled imaging sensors

Zewen Li, Xi Wang, Zhonghua Shen, Jian Lu, and Xiaowu Ni
Appl. Opt. 54(3) 378-388 (2015)

Study on the mechanism of a charge-coupled device detector irradiated by millisecond pulse laser under functional loss

Mingxin Li, Guangyong Jin, Yong Tan, Ming Guo, and Pengbo Zhu
Appl. Opt. 55(6) 1257-1261 (2016)

Mechanisms for laser-induced functional damage to silicon charge-coupled imaging sensors

Chenzhi Zhang, Ludovic Blarre, Rodger M. Walser, and Michael F. Becker
Appl. Opt. 32(27) 5201-5210 (1993)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription