Abstract

We propose a defect detection system to identify phase defects on optics based on a lensless reflective point diffraction interferometer (LRPDI). The optics under test are illuminated by a collimated beam to produce a signal wavefront carrying the defect information, and then the signal wavefront is recorded in a high carrier interferogram using the LRPDI. By lensless imaging, amplitude and phase defects, as well as the accurate phase of a phase defect, can be identified. The simulation and experiment demonstrate the success of the proposed system in detecting phase defects, and its high-accuracy and high-resolution dynamic detection abilities are verified.

© 2017 Optical Society of America

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Supplementary Material (8)

NameDescription
» Visualization 1       Propagation of the amplitude defect: interferogram.
» Visualization 2       Propagation of the amplitude defect: amplitude.
» Visualization 3       Propagation of the amplitude defect: phase.
» Visualization 4       Propagation of the phase defect: interferogram.
» Visualization 5       Propagation of the phase defect: amplitude.
» Visualization 6       Propagation of the phase defect: phase.
» Visualization 7       Phase variations of defect b.
» Visualization 8       Phase variations of defect c.

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Equations (10)

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